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1.5 Application of CleanroomIndustrial cleanroom is mainly applied in electronics industry standard for semiconductor manufacturing represented by IC/LSI. Furthermore, it extends its application in new material development and Fine Chemical Industry. One of the industrial cleanroom criteria is that, its employment will get the investment capital returned with the improvement of quality and production yield of the products. In short, the investment for industrial cleanroom is profitable. What level of cleanroom is necessary for what kind of products is determine by the product requirement. It is important to design the higher cleanroom for the more important production area and lower and economical cleanroom for other areas. The figure below shows the industries which need cleanroom and the cleanliness class generally applied therein.
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Cleanroom
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