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1.7.2 Bay System

PRODUCTS
Large LCD,HD 
Controversial Points • Isolated by the partition between process area Class 1) and maintenance area (Class 1000). Class→Particles/ft3
• Wafer is exposed in the air of cleanroom.
• Filter coverage for the total ceiling area is about 30%		 
Attention Points • Establishment of the technique for chemical contamination control inside room (Concentration in air and on wafer).
• Parallelism of air flow pattern at process area.
• Keeping pressure difference between process/maintenance area.
   
   

 1.7.3 Ballroom System

PRODUCTS
LSI, Organic EL, Small LCD 
Controversial Points• Cleanliness in Ballroom about Class 1000.
• Wafers are transported by Pod.
• Energy consumption for keeping cleanliness is 1/3 as compared to Bay System CR
• Flexibility for the layout change of process Tool		 
Attention Points• Measures of chemical contamination control and criteria.
• Room temperature control.
• Keeping clean environment during maintenance of Tool.
   

1.7.4 Mini-Environment System

Inconsistency of Air Flow for Mini-Environment SystemDouble Equipped by Mini-Environment System and Cleanroom System
  
Low Class Clean Air Inflow to High Class Clean AreaIncrement of Process Tool integrated with FFU

 
 

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