1.4 Standards of Clean room
1.4.1 ISO 14644 Part 1 and 2
The new ISO Documents, ISO 14644 Parts 1 and 2 have been released by the Technical Committee ISO/TC 209: Cleanrooms and Associated Controlled Environments. With the withdrawal of the Federal Standard 209E, more and more companies and associates will be adopting these standards for the classification of airborne cleanliness classes (ISO 14644-1) and using the second part ISO 14644-2 to specify monitoring protocol (or re-certification of cleanroom) based on the cleanliness classes.
ISO 14644-1– Part 1: Classification Of Air Cleanliness
ISO 14644-1 covers the classification of air cleanliness in cleanroom and associated controlled environments exclusively in terms of concentration of airborne particles. Only particle populations having cumulative distributions based on threshold (lower limits) sizes ranging from 0.1 um to 5 um. are considered for classification purposes.
ISO 14644-2 – Part 2: Specification for Testing and Monitoring to prove continued compliance with ISO 14644-1
This part of International Standard ISO 14644 specifies requirements for periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1 for the designated classification of airborne particulate cleanliness. It also specifies requirements for monitoring of a cleanroom or clean zone (installation) to provide evidence of its continued compliance with ISO 14644-1 for the designated classification of airborne particles cleanliness.
1.4.2 FED standard 209
The first Federal Standard 209 was published in 1963 in the USA, and titled "Cleanroom and Work Station Requirements, Controlled Environments". It was revised in 1966 (209A), 1973 (B), 1987 (C), 1988 (D) and 1992 (E), and withdrawn in 2001. The class of a cleanroom is found by measuring the number of particles 0.5 μm in one cubic foot of room air, and determining which class limit is not exceeded; this is the cleanroom classification. This classification of cleanrooms is the most easily understood classification and is still widely used.
1.4.3 JIS B 9920
This Japanese standard is the equivalent of the ISO standard, but is adopted for use long before the introduction of the ISO standard. Originally titled “Measuring methods for airborne particles in clean room and evaluating methods for air cleanliness of clean room”, in its latest revision it is now titled “Classification of air cleanliness for cleanrooms”.